Plasma and ion beam characterization by non-conventional methods

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 809-813

  Kersten, H ^a   Wiese, R ^a   Hannemann, M ^a   Kapitov, A ^a   Scholze, F ^b   Neumann, H ^b   Hippler, R ^c  

^a INP Greifswald   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^c UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

Ion beam characterization; Plasma diagnostics

Indexed keywords

CHARACTERIZATION; EMISSION SPECTROSCOPY; ION BEAMS; OPTIMIZATION; PLASMA PROBES; PLASMA SOURCES;

ENERGY FLUX MEASUREMENT; ION BEAM CHARACTERIZATION; LANGMUIR PROBE;

PLASMA DIAGNOSTICS;

COATING;

EID: 24644470503     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.173     Document Type: Article

References (7)

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3. H. Kersten E. Stoffels W.W. Stoffels M. Otte C. Csambal H. Deutsch R. Hippler J. Appl. Phys. 87 2000 3637
4. M. Zeuner H. Neumann F. Scholze F. Flamm M. Tartz F. Bigl Plasma Sources Sci. Technol. 7 1998 252
5. H. Kersten D. Rohde J. Berndt H. Deutsch R. Hippler Thin Solid Films 377 2000 585
6. G. Thieme R. Wiese H. Kersten R. Hippler AIP - Proceedings 648 2002 333 (ICPDP)
7. H. Kersten R. Wiese D. Gorbov A. Kapitov F. Scholze H. Neumann Surf. Coat. Technol. 173 2003 918