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Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 913-915

Monte Carlo simulation of the PVD transport process for alloys

(4) Lugscheider, E a Bobzin, K a Papenfuss Janzen N a Parkot, D a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

Computer simulation; Multi component sputtering; Physical vapour deposition

Indexed keywords

COMPUTER SIMULATION; EMISSION SPECTROSCOPY; GLOW DISCHARGES; MAGNETRON SPUTTERING; MONTE CARLO METHODS; PHYSICAL VAPOR DEPOSITION; SUBSTRATES; THIN FILMS;

GLOW DISCHARGE OPTICAL EMISSION SPECTROMETER; MULTI COMPONENT SPUTTERING;

CHROMIUM ALLOYS;

MONTE CARLO SIMULATION;

EID: 24644470481 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.141 Document Type: Article

Times cited : (4)

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