Micro grooving on single-crystal germanium for infrared Fresnel lenses

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1925-1931

  Yan, Jiwang ^a   Maekawa, Kouki ^b   Tamaki, Jun'ichi ^b   Kuriyagawa, Tsunemoto ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMONDS; IMAGE QUALITY; INFRARED RADIATION; OPTICAL MATERIALS; SINGLE CRYSTALS; SURFACE ROUGHNESS;

FRESNEL LENSES; MICRO GROOVING; MINIATURIZATION; SINGLE-CRYSTAL GERMANIUM;

GERMANIUM;

EID: 24644463760     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/019     Document Type: Article

References (16)

1. Teegarden B J 1999 Space instrumentation for gamma-ray astronomy Nucl. Instrum. Method Phys. Res. A 422 551-61
2. Chang R, Chern T, Lin C and Lay Y 1994 Fabrication and testing of high quality small germanium plano-convex lens Opt. Lasers Eng. 21 257-72
3. Ohmori H, Ebizuka N, Morita S, Yamagata Y and Kudo H 2001 Ultraprecision micro-grinding of germanium immersion grating element for mid- infrared super dispersion spectrograph Ann. CIRP 51 221-4
4. Yin S, Ohmori H, Uehara Y, Shimizu T and Lin W 2004 Micro V-groove grinding technique of large germanium immersion grating element for mid-infrared spectrograph JSME Int. J. C 47 59-65
5. Takeuchi Y, Maeda S, Kawai T and Sawada K 2002 Manufacture of multiple-focus micro Fresnel lenses by means of nonrotational diamond grooving Ann. CIRP 51 343-6
6. Suzuki H, Higuchi T, Wajima N, Kitajima T, Okuyama S and Yamazaki H 1999 Precision grinding of micro Fresnel lens molding die-feasibility study on precision grinding of tungsten carbide J. Japan. Soc. Prec. Eng. 65 1163-8 (in Japanese)
7. Clarke D R, Kroll M C, Kirchner P D and Cook R F 1988 Amorphization and conductivity of silicon and germanium induced by indentation Phys. Rev. Lett. 60 2156-9
8. Nakasuji T, Kodera S, Hara S, Matsunaga H, Ikawa N and Shimada S 1990 Diamond turning of brittle materials for optical components Ann. CIRP 39 89-92
9. Blake P N and Scattergood R O 1990 Ductile regime machining of germanium and silicon J. Am. Ceram. Soc. 73 949-57
10. Morris J C, Callahan D L, Kulik J, Patten J A and Scattergood R O 1995 Origins of the ductile regime in single-point diamond turning of semiconductors J. Am. Ceram. Soc. 78 2015-20
11. Yan J, Maekawa K, Tamaki J and Kubo A 2004 Experimental study on the ultraprecision ductile machinability of single-crystal germanium JSME Int. J. 47 29-36
12. O'Shea D C 1985 Elements of Modern Optical Design (New York: Wiley)
13. Yan J, Syoji K, Kuriyagawa T and Suzuki H 2002 Ductile regime turning at large tool feed J. Mater. Proc. Tech. 121 363-72
14. Yan J, Syoji K and Kuriyagawa T 2002 Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method J. Japan. Soc. Prec. Eng. 68 1561-5 (in Japanese)
15. Shibata T, Fujii S, Makino E and Ikeda M 1996 Ductile-regime turning mechanism of single-crystal silicon Prec. Eng. 18 130-7
16. Yamagata M, Tanaka Y and Sasano T 1998 Efficiency simulation for diamond-turned diffractive lenses Japan. J. Appl. Phys. 37 3695-700