Ultraprecision micro-grinding of germanium immersion grating element for mid-infrared super dispersion spectrograph

CIRP Annals - Manufacturing Technology

Volumn 50, Issue 1, 2001, Pages 221-224

  Ohmori, H ^a   Ebizuka, N ^a   Morita, S ^a   Yamagata, Y ^a   Kudo, Hideaki ^b  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b NONE   (Japan)

Author keywords

Electrical tool shaping; Grating element; Ultra precision grinding

Indexed keywords

DIAMOND CUTTING TOOLS; DIFFRACTION GRATINGS; GERMANIUM; GRINDING WHEELS; SPACE TELESCOPES; SPECTROGRAPHS;

DISPERSION SPECTROGRAPHS; IMMERSION GRATING ELEMENTS; ULTRAPRECISION MICRO-GRINDING;

GRINDING (MACHINING);

EID: 0034952823     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)62109-X     Document Type: Article

References (11)

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