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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 1, 1999, Pages 174-181

Role of cerium dioxide in a tantalum diffusion barrier film for a Cu/Ta+CeO2/Si structure

(1) Lee, Sung Man a

a Yonsei University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644463367 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (10)

References (17)

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