Target fabrication of low-density and nanoporous tin oxide as laser targets to generate extreme ultraviolet

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5751, Issue II, 2005, Pages 867-873

  Nagai, Keiji ^a   Gu, Q C ^a   Norimatsu, T ^a   Nishimura, H ^a   Fujioka, S ^a   Tao, Y Z ^a   Okuno, T ^a   Nishihara, K ^a   Miyanaga, N ^a   Izawa, Y ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

EUV light sources; Laser produced plasmas; Low density target; Mass limited target; Nanoporous tin

Indexed keywords

BANDWIDTH; HYDROLYSIS; LIGHT SOURCES; LIQUID CRYSTALS; PLASMA DEVICES; TIN COMPOUNDS; ULTRAVIOLET RADIATION;

EUV LIGHT SOURCES; LOW-DENSITY TARGET; MASS-LIMITED TARGET; NANOPOROUS TIN;

NANOSTRUCTURED MATERIALS;

EID: 24644445108     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600404     Document Type: Conference Paper

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