Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet

Physics of Fluids

Volumn 16, Issue 5, 2004, Pages 1620-1629

  Sakiyama, Y ^a   Takagi, S ^a   Matsumoto, Y ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; JETS; MATHEMATICAL MODELS; MONTE CARLO METHODS; PARAMETER ESTIMATION; SILICON COMPOUNDS; THIN FILMS;

ELECTRON WAVE FUNCTIONS; INTERMOLECULAR POTENTIAL MODEL; MULTISCALE ANALYSIS; RAREFIED GAS FLOW;

FLOW OF FLUIDS;

GAS FLOW; JET; MATHEMATICAL ANALYSIS; MODELING; MONTE CARLO SIMULATION;

EID: 2442701369     PISSN: 10706631     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1659745     Document Type: Article

References (35)

1. G. A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Clarendon, Oxford, 1994).
2. G. A. Bird, "Monte Carlo simulation in an engineering context," Prog. Aeronaut. Astronaut. 74, 239 (1981).
3. K. Koura and H. Matsumoto, "Variable soft sphere molecular model for inverse-power-law or Lennard-Jones potential," Phys. Fluids A 3, 2459 (1991).
4. C. Borgnakke and P. S. Larsen, "Statistical collision model for Monte Carlo simulation of polyatomic gas mixture," J. Comput. Phys. 18, 405 (1975).
5. B. L. Hass, D. B. Hash, G. A. Bird, F. E. Lumpkin, and H. A. Hassan, "Rates of thermal relaxation in direct simulation Monte Carlo methods," Phys. Fluids 6, 2191 (1994).
6. I. D. Boyd, "Relaxation of discrete rotational energy distributions using a Monte Carlo method," Phys. Fluids A 5, 2278 (1993).
7. I. D. Boyd, "Rotational-translational energy transfer in rarefied nonequilibrium flows," Phys. Fluids A 2, 447 (1990).
8. F. Bergemann and I. D. Boyd, "New discrete vibrational energy model for the direct simulation Monte Carlo method," Prog. Aeronaut. Astronaut. 158, 174 (1994).
9. G. A. Bird, "New chemical reaction model for direct simulation Monte Carlo studies," Prog. Aeronaut. Astronaut. 158, 185 (1994).
10. M. A. Gallis and J. K. Harvey, "Maximum entropy analysis of chemical reaction energy dependence," J. Thermophys. Heat Transfer 10, 217 (1996).
11. K. Koura, "Monte Carlo direct simulation of rotational relaxation of diatomic molecules using classical trajectory calculations: Nitrogen shock wave," Phys. Fluids 9, 3543 (1997).
12. R. B. Bernstein, Atom-Molecular Collision Theory (Plenum, New York, 1979).
13. T. Tokumasu and Y. Matsumoto, "Dynamic molecular collision model for rarefied gas flow simulations by the DSMC method," Phys. Fluids 11, 1907 (1999).
14. N. Yamanishi, Y. Matsumoto, and K. Shobatake, "Multistage gas-surface interaction model for the direct simulation Monte Carlo method," Phys. Fluids 11, 3540 (1999).
15. R. A. Svehla, "Estimated viscosities and thermal conductivities of gases at high temperatures," NASA Technical Report R-132 (1962).
16. Gmelin-Institut fur Anorganische Chemie, Gmeilin Handbook of Inorganic Chemistry System 15 B1 (Springer, Berlin, 1982).
17. S. F. Boys and F. Bernardi, "The calculation of small molecular interactions by the differences of separate total energies. Some procedures with reduced errors," J. Chem. Phys. 82, 2481 (1985 ).
18. M. J. Frisch, G. W. Trucks, H. B. Schlegel, G. E. Scuseria, M. A. Robb, J. R. Cheeseman, V. G. Zakrzewski, J. A. Montgomery, Jr., R. E. Stratmann, J. C. Bruant, S. Dapprich, J. M. Millam, A. D. Daniels, K. N. Kudin, M. C. Strain, O. Farkas, J. Tomasi, V. Barone, M. Cossi, R. Cammi, B. Mennucci, C. Pomelli, C. Adamo, S. Clifford, J. Ochterski, G. A. Petersson, P. Y. Ayala, Q. Cui, K. Morokuma, D. K. Malick, A. D. Rabuck, K. Raghavachari, J. B. Foresman, J. Cioslowski, J. V. Ortiz, A. G. Baboul, B. B. Stefanov, L. A. Liashenko, P. Piskorz, I. Komaromi, R. Gomperts, R. L. Martin, D. J. Fox, T. Keith, M. A. Al-Laham, C. Y. Peng, A. Nanayakkara, C. Gonzalez, M. Challacombe, P. M. W. Gill, B. Johnson, W. Chen, M. W. Wong, J. L. Andres, M. Head-Gordon, E. S. Replogle, and J. A. Pople, Gaussian 98, Revision A.9 (Gaussian, Inc., Pittsburgh, PA, 1998).
19. R. L. Rowley and T. Pakkanen, "Determination of a methane intermolecular potential model for use in molecular simulation from ab initio calculations," J. Chem. Phys. 110, 3368 (1998).
20. S. Tsuzuki, T. Uchimaru, K. Tanabe, and S. Kuwajima, "Refinement of nonbonding interaction potential parameter for methane on the basis of the pair potential obtained by MP3/6-311G(3d,3p) level ab initio molecular orbital calculation: The anisotropy of H-H interaction," J. Phys. Chem. A 98, 1830 (1994).
21. R. L. Rowley, Y. Yang, and T. Pakkanen, "Determination of an ethane intermolecular potential model for use in molecular simulation from ab initio calculations," J. Chem. Phys. 114, 6058 (2001).
22. J. O. Hirschfelder, C. F. Curtiss, and R. B. Bird, Molecular Theory of Gases and Liquids (Wiley, New York, 1954).
23. K. Koura, "Null-collision technique in the direct-simulation Monte Carlo method," Phys. Fluids 29, 3509 (1986).
24. R. Malik and E. Gulari, "Pulsed supersonic jet epitaxy: A nonthermal approach to silicon growth," Appl. Phys. Lett. 68, 3156 (1996).
25. 4 on polysilicon and Si(100)," J. Appl. Phys. 82, 6281 (1997).
26. K. A. Pacheco, B. A. Ferguson, and C. B. Mullins, "Growth and characterization of silicon thin films employing supersonic jets," J. Vac. Sci. Technol. A 15, 2190 (1997).
27. G. Chen, I. D. Boyd, S. Roadman, and J. Engstrom, "Monte Carlo analysis of a hyperthermal silicon deposition process," J. Vac. Sci. Technol. A 16, 689 (1998).
28. G. Chen and I. D. Boyd, "Modeling of silicon deposition process scale-up employing axisymmetric ring nozzle sources 1," J. Vac. Sci. Technol. A 17, 970 (1999).
29. G. Chen, I. D. Boyd, and J. R. Engstrom, "Three dimensional modeling of silicon deposition process scale-up employing supersonic jets 2," J. Vac. Sci. Technol. A 17, 978 (1999).
30. L.-Q. Xia, M. E. Jones, N. Maity, and J. R. Engstrom, "Supersonic molecular beam scattering as a probe of thin film deposition processes," J. Vac. Sci. Technol. A 13, 2651 (1995).
31. 4 on the Si(100) and Si(111) surfaces," Chem. Phys. Lett. 229, 401 (1994).
32. L.-Q. Xia and J. R. Engstrom, "The role of surface corrugation in direct translationally activated dissociative adsorption," J. Chem. Phys. 101, 5329 (1994).
33. J. R. Engstrom, D. Hansen, M. Furjanic, and L.-Q. Xia, "Dynamics of the dissociative adsorption of disilane on Si(100): Energy scaling and the effect of corrugation," J. Chem. Phys. 99, 4051 (1993).
34. K. C. Kannenberg and I. D. Boyd, "Strategies for efficient particle resolution in the direct simulation Monte Carlo method," J. Comput. Phys. 157, 727 (2000).
35. Atomic and Molecular Beam Methods, Vol. 1, edited by G. Scoles (Oxford University Press, Oxford, 1988).