SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2190-2195

Growth and characterization of silicon thin films employing supersonic jets

(3) Pacheco, K A a Ferguson, B A a Mullins, C B a

a The University of Texas at Austin (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031524035 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580532 Document Type: Article

Times cited : (8)

References (34)

1
- 0011769714
- D. Eres, D. H. Lowndes, and J. Z. Tischler, Appl. Phys. Lett. 55, 1008 (1989).
- (1989) Appl. Phys. Lett. , vol.55 , pp. 1008
- Eres, D.¹ Lowndes, D.H.² Tischler, J.Z.³

2
- 0342840961
- D. Eres, D. H. Lowndes, J. Z. Tischler, J. W. Sharp, T. E. Haynes, and M. F. Chisholm, J. Appl. Phys. 67, 1361 (1990).
- (1990) J. Appl. Phys. , vol.67 , pp. 1361
- Eres, D.¹ Lowndes, D.H.² Tischler, J.Z.³ Sharp, J.W.⁴ Haynes, T.E.⁵ Chisholm, M.F.⁶

3
- 0346171206
- D. Eres, Mater. Res. Soc. Symp. Proc. 201, 11 (1991).
- (1991) Mater. Res. Soc. Symp. Proc. , vol.201 , pp. 11
- Eres, D.¹

4
- 1542707253
- D. Eres and J. W. Sharp, Appl. Phys. Lett. 60, 2764 (1992).
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2764
- Eres, D.¹ Sharp, J.W.²

5
- 0011712957
- S. Zhang, J. Cui, A. Tanaka, and Y. Aoyagi, Appl. Phys. Lett. 64, 1105 (1994).
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1105
- Zhang, S.¹ Cui, J.² Tanaka, A.³ Aoyagi, Y.⁴

6
- 0028443021
- J. Cui, S. Zhang, A. Tanaka, and Y. Aoyagi, Appl. Phys. Lett. 64, 3285 (1994).
- (1994) Appl. Phys. Lett. , vol.64 , pp. 3285
- Cui, J.¹ Zhang, S.² Tanaka, A.³ Aoyagi, Y.⁴

7
- 23044506011
- B. L. Halpern and J. J. Schmitt, J. Vac. Sci. Technol. A 12, 1623 (1994).
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1623
- Halpern, B.L.¹ Schmitt, J.J.²

8
- 23444448241
- S. S. Lee, D. W. Minsek, D. J. Vestyck, and P. Chen, Science 263, 1596 (1994).
- (1994) Science , vol.263 , pp. 1596
- Lee, S.S.¹ Minsek, D.W.² Vestyck, D.J.³ Chen, P.⁴

9
- 0027626327
- C. Niu, Y. Z. Lu, and C. M. Lieber, Science 261, 334 (1993).
- (1993) Science , vol.261 , pp. 334
- Niu, C.¹ Lu, Y.Z.² Lieber, C.M.³

10
- 0026916586
- D. Wang, T.-P. Ma, J. W. Golz, B. L. Halpern, and J. J. Schmitt, IEEE Electron Device Lett. 13, 482 (1992).
- (1992) IEEE Electron Device Lett. , vol.13 , pp. 482
- Wang, D.¹ Ma, T.-P.² Golz, J.W.³ Halpern, B.L.⁴ Schmitt, J.J.⁵

11
- 0343711321
- B. A. Ferguson, A. Seilidj, B. Doris, and C. B. Mullins, J. Vac. Sci. Technol. A 14, 825 (1996).
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 825
- Ferguson, B.A.¹ Seilidj, A.² Doris, B.³ Mullins, C.B.⁴

12
- 0003677913
- The Royal Society of Chemistry, Science Park, Cambridge
- Dynamics of Gas-Surface Interactions, edited by C. T. Rettner and M. N. R. Ashfold (The Royal Society of Chemistry, Science Park, Cambridge, 1991).
- (1991) Dynamics of Gas-Surface Interactions
- Rettner, C.T.¹ Ashfold, M.N.R.²

13
- 0000857767
- edited by R. J. Madix Springer, Berlin
- C. B. Mullins and W. H. Weinberg, Surface Reactions, edited by R. J. Madix (Springer, Berlin, 1994), p. 239.
- (1994) Surface Reactions , pp. 239
- Mullins, C.B.¹ Weinberg, W.H.²

14
- 0028255377
- M. L. Yu and L. A. DeLouise, Surf. Sci. Rep. 19, 285 (1994).
- (1994) Surf. Sci. Rep. , vol.19 , pp. 285
- Yu, M.L.¹ DeLouise, L.A.²

15
- 0028416741
- M. L. Yu and R. M. Nix, Surf. Sci. 306, 59 (1994).
- (1994) Surf. Sci. , vol.306 , pp. 59
- Yu, M.L.¹ Nix, R.M.²

16
- 0000239384
- S. M. Gates, Surf. Sci. 195, 307 (1987).
- (1987) Surf. Sci. , vol.195 , pp. 307
- Gates, S.M.¹

17
- 0000298018
- J. R. Engstrom, L.-Q. Xia, M. J. Furjanic, and D. A. Hansen, Appl. Phys. Lett. 63, 1821 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1821
- Engstrom, J.R.¹ Xia, L.-Q.² Furjanic, M.J.³ Hansen, D.A.⁴

18
- 0003158036
- edited by G. Scoles Oxford University Press, Oxford
- D. R. Miller, Atomic and Molecular Beam Methods, edited by G. Scoles (Oxford University Press, Oxford, 1988), p. 14.
- (1988) Atomic and Molecular Beam Methods , pp. 14
- Miller, D.R.¹

19
- 0001256272
- edited by J. H. d. Leeuw Academic, New York
- J. B. Anderson, R. P. Andres, J. B. Fenn, and G. Maise, Rarefied Gas Dynamics, edited by J. H. d. Leeuw (Academic, New York, 1966), p. 106.
- (1966) Rarefied Gas Dynamics , pp. 106
- Anderson, J.B.¹ Andres, R.P.² Fenn, J.B.³ Maise, G.⁴

20
- 21544483672
- K. A. Pacheco, B. A. Ferguson, C. Li, S. John, S. Banerjee, and C. B. Mullins, Appl. Phys. Lett. 67, 2951 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2951
- Pacheco, K.A.¹ Ferguson, B.A.² Li, C.³ John, S.⁴ Banerjee, S.⁵ Mullins, C.B.⁶

21
- 0001481591
- J. Fernandez de la Mora and J. Rosell-Llompart, J. Chem. Phys. 91, 2603 (1989).
- (1989) J. Chem. Phys. , vol.91 , pp. 2603
- Fernandez De La Mora, J.¹ Rosell-Llompart, J.²

22
- 0000109099
- J. R. Engstrom, D. A. Hansen, M. J. Furjanic, and L.-Q. Xia, J. Chem. Phys. 99, 4051 (1993).
- (1993) J. Chem. Phys. , vol.99 , pp. 4051
- Engstrom, J.R.¹ Hansen, D.A.² Furjanic, M.J.³ Xia, L.-Q.⁴

23
- 0026259253
- S. Lian, B. Fowler, S. Krishnan, L. Jung, and S. Banerjee, Mater. Sci. Eng. B 10, 181 (1991).
- (1991) Mater. Sci. Eng. B , vol.10 , pp. 181
- Lian, S.¹ Fowler, B.² Krishnan, S.³ Jung, L.⁴ Banerjee, S.⁵

24
- 0023421367
- F. Mieno, S. Nakamura, T. Deguchi, M. Maeda, and K. Inayoshi, J. Electrochem. Soc. 134, 2320 (1987).
- (1987) J. Electrochem. Soc. , vol.134 , pp. 2320
- Mieno, F.¹ Nakamura, S.² Deguchi, T.³ Maeda, M.⁴ Inayoshi, K.⁵

25
- 0024715699
- J. H. Comfort and R. Reif, J. Electrochem. Soc. 136, 2386 (1989).
- (1989) J. Electrochem. Soc. , vol.136 , pp. 2386
- Comfort, J.H.¹ Reif, R.²

26
- 85033168520
- submitted
- K. A. Pacheco, S. Banerjee, and C. B. Mullins, J. Appl. Phys. (submitted).
- J. Appl. Phys.
- Pacheco, K.A.¹ Banerjee, S.² Mullins, C.B.³

27
- 36549104118
- B. S. Meyerson, F. J. Himpsel, and K. J. Uram, Appl. Phys. Lett. 57, 1034 (1990).
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1034
- Meyerson, B.S.¹ Himpsel, F.J.² Uram, K.J.³

28
- 0027108783
- S. M. Gates, J. Cryst. Growth 120, 269 (1992).
- (1992) J. Cryst. Growth , vol.120 , pp. 269
- Gates, S.M.¹

29
- 0001180828
- L.-Q. Xia, M. E. Jones, N. Maity, and J. R. Engstrom, J. Chem. Phys. 103, 1691 (1995).
- (1995) J. Chem. Phys. , vol.103 , pp. 1691
- Xia, L.-Q.¹ Jones, M.E.² Maity, N.³ Engstrom, J.R.⁴

30
- 0002018555
- S. M. Gates and S. K. Kulkarni, Appl. Phys. Lett. 60, 53 (1992).
- (1992) Appl. Phys. Lett. , vol.60 , pp. 53
- Gates, S.M.¹ Kulkarni, S.K.²

31
- 35949011837
- K. Sinniah, M. G. Sherman, L. B. Lewis, W. H. Weinberg, J. T. Yates, and K. C. Janda, Phys. Rev. Lett. 62, 567 (1989).
- (1989) Phys. Rev. Lett. , vol.62 , pp. 567
- Sinniah, K.¹ Sherman, M.G.² Lewis, L.B.³ Weinberg, W.H.⁴ Yates, J.T.⁵ Janda, K.C.⁶

32
- 0001511430
- S. M. Gates, C. M. Greenlief, D. B. Beach, and R. R. Kunz, Chem. Phys. Lett. 154, 505 (1989).
- (1989) Chem. Phys. Lett. , vol.154 , pp. 505
- Gates, S.M.¹ Greenlief, C.M.² Beach, D.B.³ Kunz, R.R.⁴

33
- 84955033395
- L.-Q. Xia, M. E. Jones, N. Maity, and J. R. Engstrom, J. Vac. Sci. Technol. A 13, 2651 (1995).
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2651
- Xia, L.-Q.¹ Jones, M.E.² Maity, N.³ Engstrom, J.R.⁴

34
- 36549096404
- R. J. Buss, P. Ho, W. G. Breiland, and M. E. Coltrin, J. Appl. Phys. 63, 2808 (1988).
- (1988) J. Appl. Phys. , vol.63 , pp. 2808
- Buss, R.J.¹ Ho, P.² Breiland, W.G.³ Coltrin, M.E.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.