Three dimensional modeling of silicon deposition process scale-up employing supersonic jets. II

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 3, 1999, Pages 978-985

  Chen, G ^a   Boyd, I D ^a   Engstrom, J R ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005505808     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581673     Document Type: Article

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