Structure and electrical properties of CdIn2O4 thin films sputtered at elevated substrate temperatures

Physica Status Solidi (A) Applied Research

Volumn 201, Issue 5, 2004, Pages 960-966

  Li, Bin ^a   Zeng, Ling ^a   Zhang, Fengshan ^a  

^a SHANGHAI INSTITUTE OF TECHNICAL PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC PROPERTIES; ELECTRON MICROSCOPY; HIGH TEMPERATURE EFFECTS; INDIUM ALLOYS; POSITIVE IONS; SPUTTERING; STOICHIOMETRY; SUBSTRATES; THIN FILMS;

ELECTRON X-RAY MICROPROBE ANALYSIS; TRANSPARENT CONDUCTING OXIDES (TCO);

CADMIUM ALLOYS;

EID: 2442696903     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306770     Document Type: Conference Paper

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