Characterization of strain-tolerant ceramic/SAM bilayer coatings

Materials Research Society Symposium - Proceedings

Volumn 791, Issue , 2003, Pages 105-110

  Yang, Q ^a   Salami, T O ^b   Chitre, K ^a   Oliver, S R ^b   Cho, J ^a  

^a State University of New York at Binghamton   (United States)

^b BINGHAMTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; ENERGY DISPERSIVE SPECTROSCOPY; HARDNESS; INDENTATION; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MONOLAYERS; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLY; STRAIN; STRESS ANALYSIS; X RAY DIFFRACTION ANALYSIS;

CERAMIC PROCESSING; HERMETIC SEALINGS; NANOINDENTATION; STRAIN TOLERANT COATINGS;

CERAMIC COATINGS;

EID: 2442619112     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-791-q4.8     Document Type: Conference Paper

References (18)

1. T. A. Core, W. K. Tsang, and S. J. Sherman, Solid State Technol., 36 (10) 39-44 (1993).
2. T. Tsuchiya, Y. Kageyama, H. Funabashi, and J. Sakata, Sensors and Actuators A, 90, 49-55 (2001).
3. F. Ayazi, J. Microelecromechanical Syst., 10 (2) 169-79 (2001).
4. K. Gilleo, IEEE Transactions on Components and Packaging Technologies 24 (2), 309-311 (2001).
5. N. Maluf, An Introduction to Microelectromechanical Systems (Artech House, Inc., Norwood, MA, 2000).
6. G. W. Goward, Mater. Sci. Tech., 2, 194-200 (1986).
7. R. A. Miller, J. Therm. Spray Technol., 6 (1) 35-42 (1997).
8. D. I. Pantelis, P. Psyllaki, and N. Alexopoulos, Wear, 237 (2) 197-204 (2000).
9. S. Bahadur and C.-N. Yang, Wear, 196 (1-2) 156-63 (1996).
10. C.-P. Klages, M. Fryda, T. Matthée, L. Schäfer and H. Dimigen, Int. J. Refrac. Metals and Hard Mater., 16 (3) 171-76 (1998).
11. A. R. Bishop, R. G. Nuzzo, Curr. Opin. Col. Int. Sci., 1, 127-136 (1996).
12. A. Ulman, Chem. Rev., 96, 1533-1554 (1996).
13. S. W. Keller, H.-N. Kim, T. E. Mallouk, J. Am. Chem. Soc., 116, 8817-8818 (1994).
14. G. M. Whitesides, Sci. Amer. Sept., 146-149 (1995).
15. W. C. Oliver and G. M. Pharr, J. Mater. Res., 7 (6), (1992).
16. R. Saha and W. D. Nix, Acta Materialia 50, 23-38, (2002).
17. N. G. Chechenin, J. Bottiger, and J. P. Krog. Thin Solid Films 261 (1-2), 219-227 (1995).
18. M. F. Doerner, D. S. Gardner, W. D. Nix, J Mater Res 1, (1986).