AMS depth profiling of humidity in silica

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 459-462

  Pilz, W ^a   Friedrich, M ^a   Heinig, K H ^a   Schmidt, B ^a   Von Borany, J ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

AMS; Depth profile; Humidity; Implantation; Tritium

Indexed keywords

ATOMIC FORCE MICROSCOPY; FUSION REACTIONS; ION IMPLANTATION; MOSFET DEVICES; POSITIVE IONS; SCANNING; SECONDARY ION MASS SPECTROMETRY; SILICA; SPUTTERING; TRITIUM;

AMS; DEPTH PROFILE; DIAMOND LIKE CARBON (DLC);

ATMOSPHERIC HUMIDITY;

EID: 2442618926     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.102     Document Type: Conference Paper

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