The active microbolometer: A new concept in infrared detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5274, Issue , 2004, Pages 227-238

  Liddiard, Kevin C ^a  

^a Electro optic Sensor Design   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CMOS INTEGRATED CIRCUITS; CRYOGENICS; ELECTRIC RESISTANCE; INFRARED DETECTORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MODULATION; PHOTONS; SILICON; SWITCHING; THIN FILM TRANSISTORS;

PATTERN NOISE; PHOTON DETECTORS; SILICON MICROBOLOMETERS; STAGGERED FIELD EFFECT;

BOLOMETERS;

EID: 2442610569     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.530832     Document Type: Conference Paper

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