Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1198-1202

  Hayashi, Y ^a   Tokunaga, T ^a   Yogata, Y ^b   Toh, S ^b   Kaneko, K ^b   Soga, T ^a   Jimbo, T ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

Bias enhanced microwave plasma chemical vapor deposition; Corn shape carbon nanofibers; High resolution transmission electron microscopy; Nanotubes

Indexed keywords

GROWTH KINETICS; MICROWAVES; MOLYBDENUM; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

ENHANCED GROWTH METHOD; SELECTED AREA ELECTRON DIFFRACTION;

CARBON FIBERS;

DIAMOND;

EID: 2442587505     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.01.020     Document Type: Article

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