Preparation of IrO2 thin films by oxidating laser-ablated Ir

Materials Transactions

Volumn 45, Issue 3, 2004, Pages 900-903

  Liu, Yuxue ^a   Masumoto, Hiroshi ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Glancing angle incidence X ray diffraction; IrO2 thin films; Laser ablation; Optical transmittance; Resistivity; X ray photoelectron spectra

Indexed keywords

BINDING ENERGY; DIFFUSION; IRIDIUM COMPOUNDS; LASER ABLATION; NEODYMIUM LASERS; OPACITY; OXIDATION; SPUTTERING; ULTRAVIOLET SPECTROPHOTOMETERS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

GLANCING ANGLE INCIDENCE X-RAY DIFFRACTION; IRO2 THIN FILMS; RESISTIVITY; X-RAY PHOTOELECTRON SPECTRA;

THIN FILMS;

EID: 2442581315     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.45.900     Document Type: Article

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