Smart MEMS concept for high secure RF and millimeterwave communications

Microelectronics Reliability

Volumn 44, Issue 6, 2004, Pages 899-907

  Dubuc, D ^a   Saddaoui, M ^a   Melle, S ^a   Flourens, F ^a   Rabbia, L ^a   Ducarouge, B ^a   Grenier, K ^a   Pons, P ^a   Boukabache, A ^a   Bary, L ^a   Takacs, A ^b   Aubert, H ^b   Vendier, O ^c   Roux, J L ^d   Plana, R ^a  

^a LAAS CNRS   (France)

^b ENSHEEIT ^*  (France)

^c THALES ALENIA SPACE   (France)

^d CNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; DIELECTRIC PROPERTIES; ELECTROMAGNETIC COMPATIBILITY; INSERTION LOSSES; MILLIMETER WAVES; SYSTEMS ANALYSIS; THERMAL STRESS;

DESIGN COMPLEXITY; DIELECTRIC CHARGING; DYNAMIC RANGE RECEIVERS; FREQUENCY SPECTRUM;

MICROELECTROMECHANICAL DEVICES;

EID: 2442570042     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2004.02.008     Document Type: Review

References (14)

1. Katehi L., et al. MEMS and Si micromachining circuits for high frequency applications. IEEE MTT. 50(3):2003;858-868.
2. Dib N, Harokopus WP, Katehi L, Ling CC, Rebeiz GM. Study of a novel transmission line. In: Proceedings of IEEE MTT Symposium. 1991, p. 623-9.
3. Goldsmith C., Lin T.-H., Powers B., Wu W.-R., Norvell B. Micromechanical membrane switches for microwave applications. IEEE MTT-S Dig. 1995;91-94.
4. Dos Los Santos. MEMS-A Wireless Vision, 2001. In: International MEMS Workshop, Singapore. July 4-6, 2001.
5. Grenier K, et al. Bulk Silicon Micromachined MEMS Switch for millimeter wave applications. European Microwave Conference, London, 2001. p. 181-4.
6. Fogale Nanotech www.fogale.fr.
7. Sze S.M. Physics of semiconductor devices. 1981;John Wiley & Sons, New York.
8. Goldsmith C, et al. Lifetime characterization of capacitive RF MEMS switches. In: Proceedings of IEEE IMS symposium, vol 1, May 2001.
9. De Wolf I. Reliability investigation of RF MEMS. In: Proceedings of 4th MSWAVE Workshop, Toulouse, July 2003.
10. Melle S, et al. Investigation of dielectric degradation of microwave capacitive microswitches. In: IEEE MEMS 2004, Mastricht. p. 141-4.
11. Grenier K, Pons P, Plana R, Cazaux JL, Boulanger C, Parra T, Graffeuil J. Highly Compact Micromachined Coplanar Bandpass Filter. In: Proceedings of EuMC'2000, Paris, October 2000, vol. 1. p. 129-32.
12. Guan-Leng Tan, Mihailovich R.E., Hacker J.B., DeNatale J.F., Rebeiz G.M. A 2-bit miniature X-band MEMS phase shifter. IEEE Microwav. Wireless Components Lett. 13(4):2003;146-148.
13. Kobayashi K.W., Oki A.K., Umemoto D.K., Claxton S.K.Z., Streit D.C. Monolithic GaAs HBT p-i-n diode variable gain amplifiers, attenuators, and switches. IEEE MTT. 41(12):1993;2295-2302.
14. Mizutani H., Funabashi M., Kuzuhara M., Takayama Y. Compact DC-60 GHz HJFET MMIC switches using ohmic electrode-sharing technology. IEEE-MTT. 46(11):1998;1597-1603.