Contactless excitation and measurement method for inspection of microstructures and thin films

Review of Scientific Instruments

Volumn 73, Issue 7, 2002, Pages 2651-

  Kobayashi, Toshihiro ^a   Hara, Tamio ^a   Ohsawa, Jun ^a   Yamaguchi, Naohiro ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036639410     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1484237     Document Type: Article

References (0)