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Volumn 5276, Issue , 2004, Pages 376-383
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Fabrication of thin-film transistors on plastic substrates by spin etching and device transfer process
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Author keywords
Plastic substrate; Poly Si Thin Film Transistor; Spin etching; Stress
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Indexed keywords
CRYSTALLIZATION;
ELECTRONICS ENGINEERING;
ETCHING;
SILICON WAFERS;
SUPERCONDUCTING TRANSITION TEMPERATURE;
THERMAL EFFECTS;
THERMAL EXPANSION;
THIN FILM DEVICES;
ACTIVE MATRIX LIQUID CRYSTAL DISPLAY (AMLCD);
DEVICE TRANSFER BY BACKSIDE ETCHING;
PLASTIC SUBSTRATE;
SPIN ETCHING;
THIN FILM TRANSISTORS;
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EID: 2442497161
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.522034 Document Type: Conference Paper |
Times cited : (1)
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References (11)
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