Fabrication of thin-film transistors on plastic substrates by spin etching and device transfer process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5276, Issue , 2004, Pages 376-383

  Wang, Shuo Cheng ^a   Hsu, Chung Ti ^a   Yeh, Ching Fa ^a   Lou, Jen Chung ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Plastic substrate; Poly Si Thin Film Transistor; Spin etching; Stress

Indexed keywords

CRYSTALLIZATION; ELECTRONICS ENGINEERING; ETCHING; SILICON WAFERS; SUPERCONDUCTING TRANSITION TEMPERATURE; THERMAL EFFECTS; THERMAL EXPANSION; THIN FILM DEVICES;

ACTIVE MATRIX LIQUID CRYSTAL DISPLAY (AMLCD); DEVICE TRANSFER BY BACKSIDE ETCHING; PLASTIC SUBSTRATE; SPIN ETCHING;

THIN FILM TRANSISTORS;

EID: 2442497161     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.522034     Document Type: Conference Paper

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