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Volumn 5276, Issue , 2004, Pages 376-383

Fabrication of thin-film transistors on plastic substrates by spin etching and device transfer process

Author keywords

Plastic substrate; Poly Si Thin Film Transistor; Spin etching; Stress

Indexed keywords

CRYSTALLIZATION; ELECTRONICS ENGINEERING; ETCHING; SILICON WAFERS; SUPERCONDUCTING TRANSITION TEMPERATURE; THERMAL EFFECTS; THERMAL EXPANSION; THIN FILM DEVICES;

EID: 2442497161     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.522034     Document Type: Conference Paper
Times cited : (1)

References (11)
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    • 2442436300 scopus 로고    scopus 로고
    • A. Asano et al., SID Digest, pp. 1196-1199, 2002
    • (2002) SID Digest , pp. 1196-1199
    • Asano, A.1
  • 8
    • 0344494110 scopus 로고    scopus 로고
    • S. C. Wang et al., Jpn. J. Appl. Phys., 42, No.9AB, pp. 1044-1046, 2003
    • (2003) Jpn. J. Appl. Phys. , vol.42 , Issue.9 AB , pp. 1044-1046
    • Wang, S.C.1
  • 10
    • 8344228894 scopus 로고    scopus 로고
    • JSR Corp., "Datasheet." http://www.jsr.co.jp, 2003
    • (2003) Datasheet


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.