Sheath structure in electronegative plasmas with finite positive ion temperature

Journal of Applied Physics

Volumn 95, Issue 9, 2004, Pages 4585-4592

  Palop, J I Fernández ^a   Ballesteros, J ^a   Hernandez M A ^a   Crespo, R Morales ^a   Del Pino, S Borrego ^a  

^a UNIVERSITY OF CÓRDOBA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CARRIER CONCENTRATION; DISCHARGE LAMPS; ELECTRIC POTENTIAL; EQUATIONS OF STATE; IONS; MATHEMATICAL MODELS; NAVIER STOKES EQUATIONS; PARTIAL PRESSURE; SURFACE PROPERTIES;

ION FLOW; POSITIVE ION DENSITY; SHEATH STRUCTURE; THERMAL MOTION;

PLASMAS;

EID: 2442441092     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1688447     Document Type: Article

References (26)

1. R. N. Franklin and J. Snell, J. Phys. D 31, 2532 (1998).
2. M. S. Benilov and R. N. Franklin, J. Plasma Phys. 62, 541 (1999).
3. J. I. Fernández Palop, J. Ballesteros, V. Colomer, M. A. Hernández, and A. Dengra, J. Appl. Phys. 77, 2937 (1995).
4. J. I. Fernández Palop, J. Ballesteros, M. A. Hernández, and R. Morales Crespo, J. Appl. Phys. 91, 2587 (2002).
5. J. I. Fernández Palop, V. Colomer, J. Ballesteros, M. A. Hernández, and A. Dengra, Surf. Coat. Technol. 84, 341 (1996).
6. U. Flender and K. Wiesemann-K, J. Plasma Phys. 15, 123 (1995).
7. J. I. Fernández Palop, J. Ballesteros, V. Colomer, and M. A. Hernández, J. Appl. Phys. 80, 4282 (1996).
8. J. I. Fernández Palop, J. Ballesteros, V. Colomer, and M. A. Hernández, Rev. Sci. Instrum. 66, 4625 (1995).
9. A. Buuron, F. Koch, M. Nothe, and H. Bolt, Surf. Coat. Technol. 119, 755 (1999).
10. M. Schmidt, R. Foest, and R. Basner, J. Phys. IV 8, 231 (1998).
11. N. St J. Braithwaite and J. E. Allen, J. Phys. D 21, 1733 (1988).
12. H. Amemiya, J. Phys. Soc. Jpn. 57, 887 (1988).
13. H. Amemiya, J. Phys. D 23, 999 (1990).
14. H.-B. Valentini and F. Herrmann, J. Phys. D 29, 1175 (1996).
15. T. E. Sheridan, N. St. J. Braithwaite, and R. W. Boswell, Phys. Plasmas 6, 4375 (1999).
16. T. E. Sheridan, P. Chabert, and R. W. Boswell, Plasma Sources Sci. Technol. 8, 457 (1999).
17. A. Kono, J. Phys. D 32, 1357 (1999).
18. R. N. Franklin, Plasma Sources Sci. Technol. 9, 191 (2000).
19. R. N. Franklin and J. Snell, J. Phys. D 33, 1990 (2000).
20. K.-U. Riemann, J. Phys. D 24, 493 (1991).
21. E. Zawaideh, F. Najmabadi, and R. W. Conn, Phys. Fluids 29, 463 (1986).
22. F. F. Chen, Introduction to Plasma Physics and Controlled Fusion (Plenum, New York, 1979).
23. J. I. Fernández Palop, J. Ballesteros, V. Colomer, and M. A. Hernández, J. Phys. D 29, 2832 (1996).
24. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes in C. The Art of Scientific Computing (Cambridge University Press, Cambridge, 1991).
25. R. P. Brent, Algorithms for Minimization without Derivatives (Prentice-Hall, Englewood Cliff, N. J., 1973), Chaps. 3 and 4.
26. M. Nachman and P. C. Thanh, IEEE Trans. Plasma Sci. 19, 423 (1991).