Transient processes in an Ar+I2 dc discharge

Journal of Applied Physics

Volumn 80, Issue 8, 1996, Pages 4282-4291

  Fernandez Palop J I ^a   Ballesteros, J ^a   Colomer, V ^a   Hernandez M A ^a  

^a UNIVERSITY OF CÓRDOBA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2442512788     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363388     Document Type: Article

References (31)

1. H. Amemiya, J. Phys. D 23, 999 (1990).
2. N. L. Aleksandrov and A. Napartivoch, Phys. Usp. 36, 107 (1993).
3. P. G. Daniels, R. N. Franklin, and J. Snell, J. Phys. D 23, 823 (1990).
4. R. N. Franklin and J. Snell, J. Phys. D 25, 453 (1992).
5. R. N. Franklin, P. G. Daniels, and J. Snell, J. Phys. D 26, 1638 (1993).
6. R. N. Franklin and J. Snell, J. Phys. D 27, 2102 (1994).
7. C. M. Ferreira and G. Gousset, J. Phys. D 24, 775 (1991).
8. J. I. Fernández Palop, J. Ballesteros, V. Colomer, M. A. Hernández, and A. Dengra, J. Appl. Phys. 77, 2937 (1995).
9. J. I. Fernández Palop, V. Colomer, J. Ballesteros, M. A. Hernández, and A. Dengra, Surf. Coat. Technol. (to be published).
10. N. St. J. Braithwaite and J. E. Allen, J. Phys. D 24, 1773 (1998).
11. H. Amemiya, J. Phys. Soc. Jpn. 57, 887 (1988).
12. H. Amemiya, K. Ogawa, T. Suzuki, and M. Endou, J. Phys. D 26, 2174 (1993).
13. M. B. Hopkins and W. G. Graham, J. Phys. D 20, 838 (1987).
14. H.-M. Katsch and E. Quandt, J. Phys. D 25, 430 (1992).
15. K. N. Mellon, B. P. Coonan, and M. B. Hopkins, J. Phys. D 27, 2480 (1994).
16. M. B. Hopkins, M. Bacal, and W. G. Graham, J. Appl. Phys. 70, 2009 (1991).
17. J. L. Cooney, D. W. Aossey, J. E. Williams, M. T. Gavin, H. S. Kim, Y.-C. Hsu, A. Scheller, and K. E. Lonngren, Plasma Sources Sci. Technol. 2, 73 (1993).
18. J. I. Fernández Palop, J. Ballesteros, V. Colomer, and M. A. Hernández, Rev. Sci. Instrum. 66, 4625 (1995).
19. M. B. Hopkins and W. G. Graham, Rev. Sci. Instrum. 57, 2210 (1986).
20. I. D. Sudit and R. C. Woods, Rev. Sci. Instrum. 64, 2440 (1993).
21. H. M. Mott-Smith and I. Langmuir, Phys. Rev. 28, 727 (1926).
22. M. J. Druyvesteyn, Z. Phys. 64, 781 (1930).
23. V. A. Godyak, Plasma Surface Interactions and Processing of Material (Kluwer Academic, Dordrecht, 1990).
24. S. L. F. Richards, R. P. Jones, G. J. Lloyd, Int. J. Electron. 38, 551 (1975).
25. H. C. Hayden, Comput. Phys. 1, 74 (1987).
26. L. A. Jacobson, Comput. Phys. 4, 400 (1990).
27. J. I. Fernández Palop, Ph.D. thesis, University of Seville, Spain, 1994.
28. J. D. Swift and M. J. R. Schwar, Electrical Probes for Plasma Diagnostics (Iliffe, London, 1970).
29. V. E. Golant, A. P. Zhilinsky, and I. E. Sakharov, Fundamentals of Plasma Physics (Wiley, New York, 1980), Chap. 5.
30. M. Morand, Tratado Práctico de la Técnica de Vacío (Ediciones Urmo, Bilbao, 1968), Chap. 12.
31. E. Stoffels and W. Stoffels, Ph.D. thesis, Eindhoven University of Technology, The Netherlands, 1994, Chap. 6.