Microstructure of Au film prepared by magnetron Sputtering deposition

Chinese Physics Letters

Volumn 22, Issue 3, 2005, Pages 730-732

  Jiang, Yong ^a   Guan, Bo ^a   Xu, Xiao Liang ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; GRAIN GROWTH; X RAY DIFFRACTION;

ABNORMAL GRAIN GROWTH; AU FILM; GOLD FILM; GRAIN GROW; GRAIN GROWTH PROCESS; GRAINSIZE; MAGNETRON-SPUTTERING DEPOSITION; NORMAL GRAIN GROWTH; NUCLEAR GROWTHS; NUCLEATION GROWTH;

MICROSTRUCTURE;

EID: 24144491278     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/22/3/058     Document Type: Article

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