Effect of substrate material on phase evolution in reactively sputtered Cr-Al-N films

Journal of Materials Science

Volumn 39, Issue 24, 2004, Pages 7369-7371

  Sun, Y ^a   Wang, Y H ^a   Seow, H P ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CR-AL-N FILMS; PHASE CONSTITUENTS; SUBSTRATE MATERIALS;

CHROMIUM ALLOYS; CRYSTAL STRUCTURE; LATTICE CONSTANTS; X RAY DIFFRACTION ANALYSIS;

METALLIC FILMS;

EID: 24144483417     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1023/B:JMSC.0000048753.48402.70     Document Type: Conference Paper

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