Two-dimensional temperature distribution inside a hemispherical bowl-shaped target for plasma source ion implantation

Chinese Physics

Volumn 14, Issue 1, 2005, Pages 163-168

  Liu, Cheng Sen ^a,b   Wang, Yan Hui ^a   Wang, De Zhen ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b LIAONING NORMAL UNIVERSITY   (China)

Author keywords

Hemispherical bowl shaped vessel; Ion heating; Plasma source ion implantation

Indexed keywords

NATURAL FREQUENCIES; PLASMA SHEATHS; PLASMA SOURCES; RADIATION; SURFACE TREATMENT; TEMPERATURE DISTRIBUTION; THERMOANALYSIS;

HEMISPHERICAL BOWL-SHAPED VESSELS; ION HEATING; PLASMA SOURCE ION IMPLANTATION (PSII); RADIATIVE ENERGY;

ION IMPLANTATION;

EID: 24144473888     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-1963/14/1/030     Document Type: Article

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