Ion dynamics of pulsed plasma source ion implantation in the sheath of a hemispherical bowl-shaped target

Surface and Coatings Technology

Volumn 171, Issue 1-3, 2003, Pages 119-123

  Liu, Chengsen ^a   Wang, Dezhen ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Hemispherical bowl shaped vessel; Plasma source ion implantation; Sheath simulation; Spherical coordinates

Indexed keywords

MATHEMATICAL MODELS; PLASMAS; POISSON EQUATION; SURFACE PROPERTIES;

TEMPORAL EVOLUTION;

ION IMPLANTATION;

FLUID DYNAMICS; ION IMPLANTATION; PLASMA; SURFACE PROPERTY; TEMPERATURE EFFECT;

EID: 0038721131     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00251-2     Document Type: Article

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