Neural-network-based sensor fusion of optical emission and mass spectroscopy data for real-time fault detection in reactive ion etching

IEEE Transactions on Industrial Electronics

Volumn 52, Issue 4, 2005, Pages 1063-1072

  Hong, Sang Jeen ^a,b   May, Gary S ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Myong Ji University   (South Korea)

Author keywords

Neural networks (NNs); Optical emission spectroscopy (OES); Reactive ion etching (RIE); Real time fault detection; Residual gas analysis (RGA); Sensor fusion; Time series modeling

Indexed keywords

BACKPROPAGATION; EMISSION SPECTROSCOPY; LIGHT EMISSION; MASS SPECTROMETERS; MATHEMATICAL MODELS; MULTILAYER NEURAL NETWORKS; REACTIVE ION ETCHING; SENSOR DATA FUSION;

OPTICAL EMISSION SPECTROSCOPY (OES); REAL TIME FAULT DETECTION; RESIDUAL GAS ANALYSIS (RGA); TIME SERIES MODELING;

OPTICAL SENSORS;

EID: 24144470064     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2005.851663     Document Type: Article

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