Surface morphology study of a SrTiO3 thin film in a multilayer structure treated by chemical-mechanical polishing

Journal of Crystal Growth

Volumn 283, Issue 1-2, 2005, Pages 163-169

  Prijamboedi, B ^a   Takashima, H ^a   Shoji, A ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

A1. Atomic force microscopy; A1. Surface processes; A3. Laser epitaxy; B2. Dielectric materials; B3. Superconducting materials

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL POLISHING; DIELECTRIC MATERIALS; MULTILAYERS; SUPERCONDUCTING MATERIALS; SURFACES; THIN FILMS;

LASER EPITAXY; OUTGROWTH; SURFACE PROCESSES;

STRONTIUM COMPOUNDS;

EID: 24144458896     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.05.062     Document Type: Article

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