High UV sensitivity of SiON film and its application to center wavelength trimming of microring resonator filter

IEICE Transactions on Electronics

Volumn E88-C, Issue 5, 2005, Pages 998-1004

  Ueno, Satoshi ^a   Naganawa, Toshiki ^a   Kokubun, Yasuo ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

Microring resonator; SiON; Trimming; UV sensitivity

Indexed keywords

DENSE WAVELENGTH DIVISION MULTIPLEXING; ELECTRIC FILTERS; FABRICATION; PHOTOLITHOGRAPHY; RESONATORS; SENSITIVITY ANALYSIS; THIN FILMS; TRIMMING;

MICRORING RESONATORS; SION; UV SENSITIVITY; WAVELENGTH FILTERS;

SILICON COMPOUNDS;

EID: 24144443846     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: 10.1093/ietele/e88-c.5.998     Document Type: Conference Paper

References (6)

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