Generation of bonding structure due to organic carbon and organometallic carbon as a function of gas source

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 6 A, 2005, Pages 4103-4107

  Oh, Teresa ^a  

^a Changwon National University   (South Korea)

Author keywords

Blue shift; Diels Alder reaction; Organic carbon; Organometallic carbon; Red shift

Indexed keywords

ANNEALING; BONDING; CROSSLINKING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SILICON COMPOUNDS; THIN FILMS;

BLUE SHIFT; DIELS-ALDER REACTION; ORGANIC CARBON; ORGANOMETALLIC CARBON; RED SHIFT;

ORGANOMETALLICS;

EID: 23944526792     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.4103     Document Type: Article

References (14)

1. P. Masri: Surf. Sci. Rep. 48 (2002) 1.
2. A. Grill and D. A. Neumayer: J. Appl. Phys. 94 (2003) 6697.
3. G. Galli, R. M. Martin, R. Car and M. Parrinello: Phys. Rev. Lett. 62 (1989) 555.
4. T. C. Chang, P. T. Liu, Y. S. Mor, S. M. Sze, Y. L. Yang, M. S. Feng, F. M. Pan, B. T. Dai and C. Y. Chang: J. Electrochem. Soc. 146 (1999) 3802.
5. M. A. Tamor and C. H. Wu: J. Appl. Phys. 67 (1990) 1007.
6. J. Y. Kim, M. S. Hwang, Y. H. Kim, H. J. Kim and Y. Lee: J. Appl. Phys. 90 (2001) 2469.
7. J. H. Yun, E. S. Choi, C. M. Jang and C. S. Lee: Jpn. J. Appl. Phys. 41 (2002) L418.
8. T. Oh, K. M. Lee, K. S. Kim and C. K. Choi: Jpn. J. Appl. Phys. 43 (2004) 6354.
9. J. R. Kalnin and E. Kotomin: J. Phys. A 31 (1998) 7227.
10. O. Levy and D. Stroud: Phys. Rev. B 56 (1997) 8035.
11. S. N. Delanoye, W. A. Herrebout and B. J. V. d. Veken: J. Am. Chem. Soc. 124 (2002) 7490.
12. X. Li, L. Liu and H. B. Schlegel: J. Am. Chem. Soc. 124 (2000) 9639.
13. T. Oh, H. S. Kim, S. B. Oh and M. S. Won: Jpn. J. Appl. Phys. 42 (2003) 6292.
14. T. Oh, K. S. Kim, K. M. Lee and C. K. Choi: Jpn. J. Appl. Phys. 43 (2004) 6319.