|
Volumn 44, Issue 6 A, 2005, Pages 4052-4056
|
Novel Ir-Ti alloy electrodes for high-density ferroelectric memory applications
a a a b a |
Author keywords
Electrode; FRAM; Ir Ti alloy; MOCVD; PZT
|
Indexed keywords
ANNEALING;
DOPING (ADDITIVES);
FERROELECTRIC MATERIALS;
IRIDIUM ALLOYS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
THIN FILMS;
FRAM;
IR-TI ALLOYS;
PZT;
ELECTROCHEMICAL ELECTRODES;
|
EID: 23944495531
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.44.4052 Document Type: Article |
Times cited : (4)
|
References (12)
|