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Volumn 44, Issue 6 A, 2005, Pages 4052-4056

Novel Ir-Ti alloy electrodes for high-density ferroelectric memory applications

Author keywords

Electrode; FRAM; Ir Ti alloy; MOCVD; PZT

Indexed keywords

ANNEALING; DOPING (ADDITIVES); FERROELECTRIC MATERIALS; IRIDIUM ALLOYS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; THIN FILMS;

EID: 23944495531     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.4052     Document Type: Article
Times cited : (4)

References (12)
  • 7
    • 23944439726 scopus 로고
    • ASM Interna tional, Ohio, 2nd ed.
    • Binary Alloy Phase Diagrams, ed. T. B. Massalski (ASM Interna tional, Ohio, 1992). 2nd ed., Vol. 3, p. 2343.
    • (1992) Binary Alloy Phase Diagrams , vol.3 , pp. 2343
    • Massalski, T.B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.