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Journal of Applied Physics

Volumn 98, Issue 3, 2005, Pages

Self-affine roughness influence on the pull-in voltage in capacitive electromechanical devices

(1) Palasantzas, G a

a UNIVERSITY OF GRONINGEN (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ROUGHNESS AMPLITUDE; SELF-AFFINE ROUGHNESS;

CAPACITORS; SURFACE ROUGHNESS; VOLTAGE CONTROL;

ELECTROMECHANICAL DEVICES;

EID: 23944463457 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2005376 Document Type: Article

Times cited : (17)

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