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Proceedings of the American Control Conference

Volumn 1, Issue , 2005, Pages 733-738

Reverse engineering a multivariable controller: A case study

(2) Freudenberg, J S a Karnik, A Y a

a UNIVERSITY OF MICHIGAN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CONTROL SYSTEM ANALYSIS; DECENTRALIZED CONTROL; REVERSE ENGINEERING;

BANWIDTH LIMITATIONS; MULTIVARIABLE CONTROLLERS; PLANT INTERACTIONS;

MULTIVARIABLE CONTROL SYSTEMS;

EID: 23944457912 PISSN: 07431619 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (4)

References (9)

1
- 0028738419
- A feedback limitation of decentralized controllers for TITO systems, with application to reactive ion etching
- Orlando, FL
- J. S. Freudenberg, J. W. Grizzle, and B. A. Rashap. A feedback limitation of decentralized controllers for TITO systems, with application to reactive ion etching. In Proceedings of the 1994 CDC, Orlando, FL, 1994.
- (1994) Proceedings of the 1994 CDC
- Freudenberg, J.S.¹ Grizzle, J.W.² Rashap, B.A.³

2
- 0002846061
- Real-time feedback control of reactive ion etching
- Monterey, CA, September
- M. Elta, et al. Real-time feedback control of reactive ion etching. In Proceedings of the 1993 SPIE Conference on Microelectronics Manufacturing, pages 438-451, Monterey, CA, September 1993.
- (1993) Proceedings of the 1993 SPIE Conference on Microelectronics Manufacturing , pp. 438-451
- Elta, M.¹

3
- 21844508316
- Real-time feedback for sidewall profile control in reactive ion etching
- May/Jun
- B. Rashap, J. Freudenberg, and M. Elta. Real-time feedback for sidewall profile control in reactive ion etching. J. Vac. Sci. Technol. A, 13(3): 1792-1796, May/Jun 1995.
- (1995) J. Vac. Sci. Technol. A , vol.13 , Issue.3 , pp. 1792-1796
- Rashap, B.¹ Freudenberg, J.² Elta, M.³

4
- 0029359070
- Control of semiconductor manufacturing equipment: Real-time feedback control of a reactive ion etcher
- August
- B.A. Rashap, et al. Control of semiconductor manufacturing equipment: Real-time feedback control of a reactive ion etcher. IEEE Transactions on Semiconductor Manufacturing, 8(3):286-297, August 1995.
- (1995) IEEE Transactions on Semiconductor Manufacturing , vol.8 , Issue.3 , pp. 286-297
- Rashap, B.A.¹

5
- 0003699181
- Lattice Press, Sunset Beach, CA
- S. Wolf and R.N. Tauber. Silicon Processing for the VLSI Era: Process Technology, volume 1. Lattice Press, Sunset Beach, CA, 1986.
- (1986) Silicon Processing for the VLSI Era: Process Technology , vol.1
- Wolf, S.¹ Tauber, R.N.²

6
- 0033363949
- Properties of single input two output systems
- J. Freudenberg and Rick Middleton. Properties of Single Input Two Output Systems, Int. Journal of Control, volume 72, no. 16, 1446-1465, 1999.
- (1999) Int. Journal of Control , vol.72 , Issue.16 , pp. 1446-1465
- Freudenberg, J.¹ Middleton, R.²

7
- 0033906923
- Variable camshaft timing engine control
- January
- A. G. Stefanopoulou and J. S. Freudenberg and J. W. Grizzle. Variable Camshaft Timing Engine Control, IEEE Transactions on Control Systems Technology, volume 8, no. 1, 22-34, January 2000.
- (2000) IEEE Transactions on Control Systems Technology , vol.8 , Issue.1 , pp. 22-34
- Stefanopoulou, A.G.¹ Freudenberg, J.S.² Grizzle, J.W.³

8
- 23944522748
- Electronic throttle and wastegate control for turbocharged gasoline engines
- Portland, OR
- A.Y. Karnik, J.H. Buckland and J. S. Freudenberg. Electronic Throttle and Wastegate Control for Turbocharged Gasoline Engines. In Proceedings of the 2005 ACC, Portland, OR, 2005.
- (2005) Proceedings of the 2005 ACC
- Karnik, A.Y.¹ Buckland, J.H.² Freudenberg, J.S.³

9
- 23944483377
- Control of thermal ignition in gasoline engines
- Portland, OR
- C.J. Chiang and A. G. Stefanopoulou. Control of Thermal Ignition in Gasoline Engines. In Proceedings of the 2005 ACC, Portland, OR, 2005.
- (2005) Proceedings of the 2005 ACC
- Chiang, C.J.¹ Stefanopoulou, A.G.²

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