Precipitation of highly luminescent phases from PECVD Si suboxides

Materials Research Society Symposium Proceedings

Volumn 832, Issue , 2005, Pages 153-158

  Peralvarez M ^a   Lopez M ^a   Garrido, B ^a   Morante, J R ^a   Barreto, J ^b   Cadarso, V J ^b   Riera, M ^b   Zinoviev, K ^b   Dominguez, C ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

LUMINESCENT EMISSION; LUMINESCENT PHASES; MATRIX COMPOSITION; SUBOXIDES;

ANNEALING; COMPOSITION; DENSIFICATION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; PHASE SEPARATION; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRECIPITATION (CHEMICAL); SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

SILICA;

EID: 23844483485     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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