A numerical simulation of the evolution of nanometer-scale surface topography generated by ion milling

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1178-1182

  Winningham, Thomas A ^a   Zou, Zhong ^a   Douglas, Kenneth ^a   Clark, Noel A ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003160485     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581255     Document Type: Article

References (15)

1. T. M. Mayer, E. Chason, and A. J. Howard, J. Appl. Phys. 76, 1633 (1994).
2. K. Douglas, N. Clark, and K. Rothschild, Appl. Phys. Lett. 48, 676 (1986).
3. K. Douglas, G. Devaud, and N. Clark, Science 257, 642 (1992).
4. P. Sigmund, Phys. Rev. 184, 383 (1969).
5. R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988).
6. G. Carter, B. Navinsek, and J. L. Whitton, in Sputtering by Particle Bombardment II, edited by R. Behrisch (Springer, Berlin, 1983), Chap. 6.
7. R. M. Bradley, in Handbook of Ion Beam Processing Technology, edited by J. J. Cuomo, S. M. Rossnagel, and H. K. Kaufman (Noyes, New Jersey, 1989), Chap. 15.
8. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, in Numerical Recipes in C: The Art of Scientific Computing, 2nd ed. (Cambridge University Press, New York, 1992), pp. 849-850.
9. P. W. Atkins, Physical Chemistry, 2nd ed. (W. H. Freeman, San Francisco, 1982), p. 681.
10. N. W. Ashcroft and N. D. Mermin, Solid State Physics (Holt, Reinhart, and Winston, Philadelphia, 1976), p. 9.
11. J. Melngailis, J. Vac. Sci. Technol. B 5, 469 (1987).
12. A. M. Yacout, N. Q. Lam, and J. F. Stubbins, Nucl. Instrum. Methods Phys. Res. B 42, 49 (1989).
13. K. Neubeck et al., Nucl. Instrum. Methods Phys. Res. B 106, 589 (1995).
14. R. S. Averback and H. Hahn, Phys. Rev. B 37, 10383 (1988).
15. R. M. Bradley (private communication).