Laser applications in microtechnology

Journal of Materials Processing Technology

Volumn 167, Issue 2-3, 2005, Pages 494-498

  Gillner, Arnold ^a   Holtkamp, Jens ^a   Hartmann, Claudia ^a   Olowinsky, Alexander ^a   Gedicke, Jens ^a   Klages, Kilian ^a   Bosse, Lüdger ^a   Bayer, Alexander ^a  

^a FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

Forming; Joining; Laser; Microtechnology; Structuring

Indexed keywords

ELECTRONICS INDUSTRY; ETCHING; FORMING; JOINING; MACHINING; NANOTECHNOLOGY; SILICON; SOLDERING; WELDING;

LASER ASSISTED FORMING; MICROTECHNOLOGY; SILICON ETCHING; STRUCTURING;

LASER APPLICATIONS;

EID: 23844463533     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2005.05.049     Document Type: Article

References (7)

1. ® and applications The Proceedings of the SPIE, vol. 5662 2004 291 299
2. K. Klages, J. Gedicke, and A. Olowinsky Pulse Forming at Laser Beam Micro Welding The Proceedings of the 23rd International Congress of Applications of Lasers and Electro-Optics 2004 (published on the CD)
3. ® The Proceedings of the Sixth International Symposium on Laser Precision Microfabrication 2005
4. A. Bayer, A. Gillner, P. Groche, and R. Erhardt Laser-assisted forming of metallic micro-parts The Proceedings of the Fourth International Symposium on Laser Precision Microfabrication 2003 157 162
5. A. Gillner, and C. Hartmann High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG-lasers The Proceedings of the SPIE, vol. 5662 2004 570 575
6. L. Bosse, A. Gillner, R. Poprawe, Temperature Controlled Selective Soldering With Laser Radiation, Proceedings of the Sixth International Symposium on Laser Precision Microfabrication, in press.
7. M. Wild, A. Gillner, and R. Poprawe Locally selective bonding of silicon and glass with laser Sens. Actuators A 93 2001 63 99