|
|
Volumn 5662, Issue , 2004, Pages 570-575
|
|
High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG-lasers
|
|
Author keywords
Ceramics; Diamond; Laser micro ablation
|
|
Indexed keywords
BIOCOMPATIBILITY;
CERAMIC MATERIALS;
DIAMONDS;
ELECTRIC CONDUCTIVITY;
GRINDING (MACHINING);
LASER ABLATION;
MICROMACHINING;
POLYCRYSTALLINE MATERIALS;
SCANNING;
SINTERING;
THERMAL CONDUCTIVITY;
YTTRIUM COMPOUNDS;
COMPLEX STRUCTURES;
LASER MICRO ABLATION;
POLYCRYSTALLINE DIAMOND;
THREE DIMENSIONAL MICRO GEOMETRIES;
NEODYMIUM LASERS;
|
|
EID: 20344390776
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.596565 Document Type: Conference Paper |
|
Times cited : (2)
|
|
References (3)
|
