Large scale engineered nanostructured surfaces by reactive ion etching with kinetically self-assembled non-continuous metal film as etching mask

Materials Research Society Symposium Proceedings

Volumn 849, Issue , 2005, Pages 185-191

  Wei, Wei ^a,b   Bachman, Mark ^b   Li, Guann Pyng ^a,b  

^a University of California at Irvine   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL SENSING; ETCHING MASK; NON-CONTINUOUS METAL FILM; VACUUM THERMAL ANNEALING;

ANNEALING; HYDROPHOBICITY; METALLIC FILMS; POROUS SILICON; REACTIVE ION ETCHING; SELF ASSEMBLY;

NANOSTRUCTURED MATERIALS;

EID: 23844463496     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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