Ultra-high resolution mass spectroscopy of boron cluster ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 237, Issue 1-2, 2005, Pages 406-410

  Jacobson, Dale ^a   Horsky, Thomas ^a   Krull, Wade ^a   Milgate, Bob ^a  

^a Ceradyne Inc   (United States)

Author keywords

Cluster ion implantation; ClusterBoron; Decaborane; High resolution mass spectroscopy; Ion implantation; Molecular ion implantation; Octadecaborane; Ultra low energy ion implantation

Indexed keywords

BORON; DISPERSIONS; HYDROGEN; IMPACT IONIZATION; ION IMPLANTATION; ISOTOPES; MASS SPECTROMETRY; PARAFFINS;

CLUSTER ION IMPLANTATION; CLUSTERBORON; DECABORANE; HIGH RESOLUTION MASS SPECTROSCOPY; MOLECULAR ION IMPLANTATION; OCTADECABORANE; ULTRA-LOW ENERGY ION IMPLANTATION;

ION BEAMS;

EID: 23444447588     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.05.025     Document Type: Conference Paper

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