Accelerated decomposition of gas phase metal organic molecules determined by radical reactions

Journal of Crystal Growth

Volumn 266, Issue 1-3, 2004, Pages 363-370

  Cavallotti, Carlo ^a   Moscatelli, Davide ^a   Masi, Maurizio ^a   Carrà, Sergio ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

A1. Modeling; A1. Quantum chemistry; A3. Metalorganic vapor phase epitaxy; B1. CdTe; B1. GaAs; B1. ZnSe

Indexed keywords

COMPUTER SIMULATION; DECOMPOSITION; FILM GROWTH; GALLIUM NITRIDE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SURFACE REACTIONS;

DEPOSITION PROCESS; DEPOSITION REACTOR; GAS PHASE; QUANTUM CHEMISTRY;

REACTION KINETICS;

EID: 2342646908     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.02.067     Document Type: Conference Paper

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