A review of emerging SEMI standards for particle scanners

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5188, Issue , 2003, Pages 162-168

  Stover, John C ^a  

^a Scatter Works Inc

Author keywords

Calibration standards; Capture rate; Deposition systems; Particle scanners; SEMI Standards

Indexed keywords

CALIBRATION; DEPOSITION; LATEXES; POLYSTYRENES; SCANNING; SEMICONDUCTOR DEVICE TESTING; STANDARDS;

CALIBRATION STANDARDS; CAPTURE RATES; DEPOSITION SYSTEMS; PARTICLE SCANNERS; SEMI STANDARDS;

SURFACE CHEMISTRY;

EID: 2342593968     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.519111     Document Type: Conference Paper

References (5)

1. John C. Stover; Calibration of Particle Detection Systems, published as Chapter 21 in Handbook of Silicon Semiconductor Metrology, edited by Alain Diebold; Marcel Dekker, New York NY (2001).
2. nd Edition, SPIE Press (1995).
3. John C. Stover, Vladimir. Ivakhnenko, and Yuri. A. Eremin; "The use of light scatter signals to identity particle material"; SPIE Proc. Vol 4449, p131 (2001).
4. John C. Stover and Craig A. Scheer; "Accurate sizing of deposited PSL spheres from light scatter measurements;" SPIE Proc. Vol 4449, p147 (2001).
5. SEMATECH Tech. Transfer # 99083800B-TR. Available at: www.thescatterworks.com