Accurate sizing of deposited PSL spheres from light scatter measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4449, Issue , 2001, Pages 147-150

  Stover, John C ^a   Scheer, Craig A ^a  

^a Scatter Works Inc   (United States)

Author keywords

Light scatter; Particle depositions; Particle sizing; PSL spheres; Scanner calibration

Indexed keywords

CALIBRATION; DEFECTS; DEPOSITION; LASER APPLICATIONS; LATEXES; LIGHT SCATTERING; PARTICLE SIZE ANALYSIS; SILICON WAFERS; SPHERES;

PARTICLE DEPOSITION; PARTICLE SIZING; POLYSTYRENE LATEXES; SCANNER CALIBRATION;

POLYSTYRENES;

EID: 0035761798     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.450088     Document Type: Article

References (4)

1. Mulholland G. W., N. Bryner, W. Liggett, B.W. Scheer, R.K. Goodall; Selection of calibration particles for scanning surface inspection systems; SPIE Proc V2862, p104 (1996).
2. SEMATECH Tech. Transfer # 99083800B-TR. Available at: Www.thescatterworks.com
3. Eremin Yu.A., Stover J.C., and Orlov N.V. Modeling Scatter from Silicon Wafers Features Based on Discrete Sources Method. Opt. Eng. 1999; 38: 1296-1304.
4. Doicu A., Eremin Yu., Wriedt T. Acoustic and Electromagnetic Scattering Analysis Using Discrete Sources, Academic Press, 2000.