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Volumn 427, Issue 1, 2001, Pages 39-43
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Rapid prototyping of glass and PDMS microstructures for micro total analytical systems and micro chemical reactors by microfabrication in the general laboratory
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Author keywords
TAS; Microfabrication; Miniaturization; Photolithography
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Indexed keywords
DIMETICONE;
GLASS;
ANALYTICAL EQUIPMENT;
ARTICLE;
CHEMICAL ENGINEERING;
LABORATORY;
PRIORITY JOURNAL;
REACTOR;
REPRODUCIBILITY;
TECHNIQUE;
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EID: 0035910644
PISSN: 00032670
EISSN: None
Source Type: Journal
DOI: 10.1016/S0003-2670(00)01174-0 Document Type: Article |
Times cited : (124)
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References (9)
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