The reliability of measurements on electron energy distribution function in silane rf glow discharges

Chinese Physics

Volumn 12, Issue 2, 2003, Pages 198-203

  Lin, Kui Xun ^a   Lin, Xuan Ying ^a   Chi, Ling Fei ^a   Yu, Chu Ying ^a   Yao, Ruo He ^a   Yu, Yun Peng ^a  

^a SHANTOU UNIVERSITY   (China)

Author keywords

Circuit derivation; Langmuir probe; Numerical derivation; Reliability

Indexed keywords

CARRIER CONCENTRATION; CURRENT VOLTAGE CHARACTERISTICS; DIFFERENTIATING CIRCUITS; PLASMAS; RELIABILITY; SPURIOUS SIGNAL NOISE;

AMPLIFYING EFFECT; CIRCUIT DERIVATIVE METHOD; ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); SMOOTHING PROCESS;

GLOW DISCHARGES;

EID: 23244466926     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-1963/12/2/314     Document Type: Article

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