Contaminant effect of Langmuir probe and its restraint

Gongneng Cailiao/Journal of Functional Materials

Volumn 27, Issue 5, 1996, Pages 392-395

  Lin, Kuixun ^a   Lin, Xuanying ^a   Yu, Yu,npeng ^a   Wang, Hong ^a   Hu, Shengming ^a  

^a SHANTOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; IMPURITIES; PLASMA DIAGNOSTICS; SILICON; THIN FILMS;

CONTAMINANT EFFECTS; LANGMUIR PROBES DIAGNOSTICS;

PLASMA PROBES;

EID: 0030257349     PISSN: 10019731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)