Distributed simulation of silicon-based film growth

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 2328, Issue , 2002, Pages 879-887

  Krzhizhanovskaya, V V ^a   Zatevakhin, M A ^a   Ignatiev, A A ^a   Gorbachev, Y E ^a   Sloot, P M A ^b  

^a Inst High Perf Comp Data Bases   (Russian Federation)

^b UNIVERSITY OF AMSTERDAM   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED SOFTWARE ENGINEERING; DISTRIBUTED COMPUTER SYSTEMS; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; USER INTERFACES; VISUALIZATION;

COMPUTER CLUSTERS; COMPUTING ENVIRONMENTS; DISTRIBUTED SIMULATIONS; GRAPHIC USER INTERFACE; INTERACTIVE SOFTWARE; PARALLEL IMPLEMENTATIONS; REAL TIME VISUALIZATION; WEB-BASED ACCESS;

FILM GROWTH;

EID: 23044532349     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/3-540-48086-2_98     Document Type: Conference Paper

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