Special features of the growth of hydrogenated amorphous silicon in PECVD reactors

Technical Physics

Volumn 45, Issue 8, 2000, Pages 1032-1041

  Gorbachev, Yu E ^a   Zatevakhin, M A ^a   Krzhizhanovskaya, V V ^a   Shveigert V A ^a  

^a Inst High Perf Comp Data Bases   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034338677     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1307013     Document Type: Article

References (13)

1. O. A. Golikova, Fiz. Tekh. Poluprovodn. (Leningrad) 25, 1517 (1991) [Sov. Phys. Semicond. 25, 915 (1991)].
2. O. A. Golikova, Fiz. Tekh. Poluprovodn. (Leningrad) 25, 1517 (1991) [Sov. Phys. Semicond. 25, 915 (1991)].
3. M. J. Kushner, J. Appl. Phys. 63, 2532 (1988).
4. Yu. E. Gorbachev, M. A. Zatevakhin, and I. D. Kaganovich, Zh. Tekh. Fiz. 66 (12), 89 (1996) [Tech. Phys. 41, 1247 (1996)].
5. Yu. E. Gorbachev, M. A. Zatevakhin, and I. D. Kaganovich, Zh. Tekh. Fiz. 66 (12), 89 (1996) [Tech. Phys. 41, 1247 (1996)].
6. G. J. Nienhuis, W. J. Goedheer, et al., J. Appl. Phys. 82, 2060 (1997).
7. M. I. Zhilyaev, V. A. Shveǐgert, and I. V. Shveǐgert, Prikl. Mekh. Tekh. Fiz. 35 (1), 13 (1994).
8. C. R. Wilke, Chem. Eng. Prog. 46 (2), 95 (1950).
9. J. O. Hirschfelder, C. F. Curtiss, and R. B. Bird, Molecular Theory of Gases and Liquids (Wiley, New York, 1954; Inostrannaya Literatura, Moscow, 1961).
10. I. P. Ginzburg, Friction and Heat Transfer in Moving Gas Mixtures (Leningrad. Univ., Leningrad, 1975).
11. J. Perrin and O. Leroy, Contrib. Plasma Phys. 36 (3), 3 (1996).
12. N. Itabashi, K. Kamo, and N. Nishawaki, Jpn. J. Appl. Phys. 28, 325 (1989).
13. J. Perrin, J. Phys. D 26, 1662 (1993).