Research on carbon nanotube array field emission pressure sensors

Electronics Letters

Volumn 41, Issue 14, 2005, Pages 824-825

  Qian, K ^a   Chen, T ^b   Yan, B ^a   Lin, Y ^a   Xu, D ^a   Sun, Z ^b   Cai, B ^a  

^a Shanghai Jiao Tong University   (China)

^b EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ETCHING; FABRICATION; MAGNETRON SPUTTERING; PRESSURE EFFECTS; SENSORS; SILICON;

FIELD ENHANCEMENT FACTOR; PRESSURE SENSORS; RF MAGNETRON SPUTTERING; SILICON ETCHING;

CARBON NANOTUBES;

EID: 22944446784     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20051360     Document Type: Article

References (6)

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