Development of an integrated vacuum microelectronic tactile sensor array

Sensors and Actuators, A: Physical

Volumn 103, Issue 3, 2003, Pages 301-306

  Wen, Zhiyu ^a   Wu, Ying ^a   Zhang, Zhengyuan ^a   Xu, Shilu ^a   Huang, Shanglian ^a   Li, Youli ^b  

^a CHONGQING UNIVERSITY   (China)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Field emission cathode tip array; Micro electromechanical systems (MEMS); Tactile sensor array; Vacuum microelectronics sensor

Indexed keywords

ARRAYS; ELECTRIC BREAKDOWN; FIELD EMISSION CATHODES; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; SILICON; THIN FILMS; VACUUM APPLICATIONS;

TACTILE SENSOR ARRAYS;

MICROSENSORS;

EID: 0037442860     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00392-8     Document Type: Article

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