The polishing of molds and dies using a compliance tool holder mechanism

Journal of Materials Processing Technology

Volumn 166, Issue 2, 2005, Pages 230-236

  Liu, C H ^a   Chen, C C A ^b   Huang, Jian Sheng ^c  

^a TAMKANG UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

Compliance; Force measurement; Polishing of molds and dies; Polishing parameters; Taguchi method

Indexed keywords

ABRASIVES; DEGREES OF FREEDOM (MECHANICS); GRINDING MILLS; MATHEMATICAL MODELS; MOLDS; PARTICLE SIZE ANALYSIS; POLISHING; SURFACE ROUGHNESS;

COMPLIANCE; FORCE MEASUREMENTS; POLISHING OF MOLDS AND DIES; POLISHING PARAMETERS; TAGUCHI METHODS;

DIES;

EID: 22944434169     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2004.08.021     Document Type: Article

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