Local area polishing of glass for profile modificatory polishing by fine pressure control

International Journal of the Japan Society for Precision Engineering

Volumn 31, Issue 2, 1997, Pages 115-120

  Kurobe, Toshiji ^a   Yamada, Yoshinori ^a   Sakai, Naoto ^b   Ueda, Shuji ^b   Shingu, Katsuyoshi ^b  

^a KANAZAWA UNIVERSITY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

Fine pressure control; Local area polishing; Pad shape; Repulsive magnetic force; Surface profile

Indexed keywords

EID: 22944474107     PISSN: 0916782X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. T. G. Bifanof, T. A. Dow and R. O. Scattergood : Ductile-Regime Grinding; A new Technology for Machining Brittle Materials, Trans. ASME, Vol.11 (1991) 184.
2. H. Suzuki, S. Kodera, H. Matsunaga and T. Kurobe: Magnetic Field-Assisted Polishing: Application to Curved Surface, Prec. Eng., Vol.11 (1989) 197.
3. R. A. Jones and R.L. Plante: Large Aspheric Optics, SPIE Vol.571, Large Optics Technology (1985) 84.
4. R. A. Wilson, D. W. Reicher and J. R. Mcneil : Surface Figuring Using Neutral Ion Beams, SPIE Vol.966 Advances in Fabrication and Metrology for Optics (1988) 74.
5. J. van Wingerden, H. J. Frankena and B. A. van der Zwan: Production and Measurement of Superpolished Surface, Opt. Eng., 31 (1992) 1086