Collapse behavior of microresist pattern analyzed by the tip indentation method with an atomic force microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 3, 1999, Pages 1090-1093

  Kawai, Akira ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644451254     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590700     Document Type: Article

References (12)

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